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Inverse Lithography (2014)
D2S’ Leo Pang talks with Semiconductor Engineering about lithography, inverse lithography, photomasks, where the problems are, and what needs to be done to move forward.
D2S’ Leo Pang talks with Semiconductor Engineering about lithography, inverse lithography, photomasks, where the problems are, and what needs to be done to move forward.
Пікірлер: 4
Europeans used mirrors, not lenses. What the technology it was?
@user-zz4xs9hc5e
4 жыл бұрын
It's the prejection mirrors in EUV system, since at 13.5nm wavelength, it's hard to find a high transmittance material for lens
@alexa.davronov1537
4 жыл бұрын
@@user-zz4xs9hc5e Yup, thanks.
@suntzu1409
2 жыл бұрын
EUV