FEI Themis Z S/TEM: STEM-EDS mapping

Ғылым және технология

This video tutorial (as always, filmed raw, unedited, unfiltered, uncensored, and uncut) covers STEM-EDS (otherwise known as XEDS or EDX) mapping using our Cs probe-corrected Themis Z S/TEM equipped with a SuperX EDS system.
Using a III-V semiconductor photonic device structure as a test sample, I cover STEM-EDS mapping at the atomic scale (~140 pm resolution) using "nanoprobe" STEM mode (which is what the system is well-known for performing), but also show how the system can be used effectively for STEM-EDS mapping deep into the nanoscale (~1 nm resolution) using the lesser known (and often underutilized) "microprobe" STEM mode.
The differences between aligning the system in nanoprobe STEM mode versus microprobe STEM mode are also discussed as well as when you would want to use one STEM mode versus the other for STEM-EDS mapping.
SPOILER: if you don't need to perform atomic-scale EDS mapping, you are probably fine simply using microprobe STEM mode for STEM-EDS mapping (even for very fine nanoscale features).
Thanks for watching! Please like, subscribe, and share and let me know if you have any questions or comments. Video topic requests are always welcome and appreciated; I enjoy making these videos and wish I could make them more frequently, but the demands of my job make it tough to do so; I’m in charge of 3 S/TEMs, 2 dual beam FIB/SEM systems, and 1 SEM and this keeps me very busy!
Connect with me on LinkedIn:
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E-mail me directly:
ngr@ufl.edu

Пікірлер: 10

  • @sihanchen5525
    @sihanchen55253 ай бұрын

    Excellent job! Very easy to follow but also informative.

  • @NicholasRudawski

    @NicholasRudawski

    3 ай бұрын

    Thank you; it's just a shame I ran out of drift correction!

  • @felixhu3821
    @felixhu38217 ай бұрын

    thank you,great video. Dr. Nicholas,can you demo EDS quantification by Velox app in future video?

  • @NicholasRudawski

    @NicholasRudawski

    7 ай бұрын

    He Felix: I did an entire video on quantitative EDS you can find here: kzread.info/dash/bejne/eml8o5uEY8i4nNI.htmlsi=_xstIhUyQUJEIWBW Doing EDS quantification through Velox is essentially a "black box" calculation, so I tend to take those results with a grain of salt. That being said, there isn't much to doing EDS quantification in Velox; you simply select elements, select peaks, add in absorption correction (or not), and then compute the result. It would be short video, but definitely one that could be useful for some people who rely on Velox for these results.

  • @user-ev9zc8dv3q
    @user-ev9zc8dv3q Жыл бұрын

    Great video !!!! I wonder to know...in case if I don't have aberration corrector for stem mode is it possible to get atomically resolved EDS map (we have image corrector on our FEI Themis microscope) ? Thanks a lot for your videos !

  • @NicholasRudawski

    @NicholasRudawski

    Жыл бұрын

    Thank you! Yes, it is indeed possible (though not as easy) to get atomic resolution EDS from a non-corrected instrument. In fact, the first time atomic resolution EDS was demonstrated, it was on a non-corrected instrument (though the data certainly wasn't very good). On modern non-corrected systems that are very stable with very good EDS systems, I think this can actually be done somewhat routinely and the results are rather impressive (though again, not as impressive as with a corrected instrument).

  • @sergeiremennik7604
    @sergeiremennik7604 Жыл бұрын

    Thanks for nice video! You may show also extraction of the line scan profile- it is more correct from the analysis point. How you perform the micro-prob tuning? Only what you had shown or there's more alignments?

  • @NicholasRudawski

    @NicholasRudawski

    Жыл бұрын

    Hi Sergei: You're welcome; you don't need to perform any "tuning" when using microprobe mode like when you are in nanoprobe mode. The reason for this is the small convergence angles used in microprobe mode. The corrector tuning is only needed when the convergence angles are much larger. I could have also done the beam tilt pivot points as part of the microprobe STEM alignment, but this isn't really critical. Aside from that, there isn't much else you need to do beyond what I showed to get the best performance as it is not really a "high resolution" imaging mode.

  • @jq58
    @jq58 Жыл бұрын

    Is there a specific reason why the specimen gets damaged from its right region during EDS mapping or EELS SI?

  • @NicholasRudawski

    @NicholasRudawski

    Жыл бұрын

    Great question; I'm not exactly sure, but it may be related to the scanning pattern used by the probe. Somehow, this is resulting in the probe briefly pausing at the right side of the analysis area as it is scanned from left to right. This is somewhat speculative, but I do know from experience that a stationary probe always causes more damage than a moving probe, since the moving probe isn't continuously hitting one spot.

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