FEI Helios PFIB CXe dual FIB/SEM: in-situ UHR-SEM imaging of a FIB-prepared cross-section
In this video (as always, recorded raw, unedited, unfiltered, uncensored, and uncut), I demonstrate how to use to a dual FIB/SEM (here, an FEI Helios PFIB CXe) to perform in-situ ultra high-resolution SEM imaging of a FIB-prepared cross-section. Specifically, I cover the following:
1. deposition of E-beam and I-beam assisted protective Pt straps
2. coarse FIB milling a trench to expose the cross-section face
3. fine FIB polishing of the cross-section face
4. appropriate conditions for UHR-SEM imaging and alignment
5. performing SEM auto U-mode source centering (energy filtering) as applicable
6. tilt correction and dynamic focus
7. optimal adjustment of detector contrast and brightness
8. selecting parameters for high-quality image acquisition
9. performing accurate dimensional measurements on cross-sections
Thank you for your support, my fellow electron microscopy aficionados! Please like, subscribe, and share and leave any questions or comments you may have and I will do my best to reply as soon as possible. Video topic requests are always welcome and appreciated; I enjoy making these videos and wish I could make them more frequently, but the demands of my job make it tough to do so; I’m in charge of 3 S/TEMs, 2 dual FIB/SEM systems, and 1 SEM and this keeps me very busy!
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Пікірлер: 3
Hi everyone: a couple things I need to point out here. I didn't really do a proper discussion of the SEM voltage selection, and this is rather important. I used 2 kV throughout; this is ideal for doing E-beam assisted Pt deposition because the secondary electron yield is high, and this is what drives beam-induced deposition. As far as performing the UHR-SEM imaging, 2 kV coupled with immersion mode is perfect for this as immersion mode allows the formation of very small probes at low voltages, with lower voltages also giving a highly localized signal. The other point I want to stress is that I referred to the dwell time as the frame time on several occasions, which is not correct; the dwell time is the time per pixel, so the frame time is the dwell time multiplied by the total number of pixels in the image. Sorry for any confusion.
Very nice video! Could you post a video about 4D-STEM operation?