Holding ~1 nm alignment tolerance over meter-scale distances is hard enough; holding that tolerance dynamically while the waver and mask are moving at a relative speed of several meters per sec is insane. In the time it takes the light to get from the mask to the wafer, the wafer will have moved something like 5 nm. So somewhere in those billion+ lines of code controlling the system there is a correction for the finite speed of light.

@xilw3r

3 ай бұрын

Actually its *only* less than 10 mil lines

@low-key-gamer6117

3 ай бұрын

Nope. Real time systems have less lines of code.

@solidfuel0

3 ай бұрын

More code, slower execution

@TheBokanist

3 ай бұрын

It's not moving during exposure. It stops each time. The coarse motor stops, then fine motor adjust, then light strikes. But since the source light consist in laser shooting a tin droplet to vaporise it. All this happens while the droplet is on its way.... Mad !

@kenjohnson6101

3 ай бұрын

@@TheBokanist No, it is moving. It's called "step and scan".

It always blows my mind how complex these machines are, how many technologies and innovations that has devoloped over decades to reach this point. Probably the most complex thing humans have ever constructed.

@vitorlucio1195

3 ай бұрын

It's the Manhattan/Apollo project from the private sector!

@Dell-ol6hb

3 ай бұрын

These really are among the most impressive technological acheivements we've ever made

@darthvadeth6290

3 ай бұрын

It's no complex. Tony Stark was able to build this in a cave.

@fredinit

3 ай бұрын

Impressive? Yes! Most high-speed, accurate targeting? Not by a long shot. Take a look at what the LHC has to do at the CMU, ATLAS, and other detectors. They have to shoot atomic nuclei at each other at relativistic speeds and have the computational capabilities to sort through 140Tbits of aftermath data per day. Still - ASML's machines are insanely impressive!

@musicdev

3 ай бұрын

@@vitorlucio1195I’m not quite sure about that. What was impressive about Manhattan and Apollo was the incredibly short timescale. Regardless, the semiconductor industry’s achievements are damn impressive. And I get to work at one of these chip companies 😎

You realize how precise this operation is when he says "... refractive index of the air, which changed as the stage moved around, it threw off things by as much as ONE NANOmeter, which was UNACCEPTABLE..." that is really crazy!

@alquinn8576

3 ай бұрын

yeah but why would moving the stage change the refractive index of air?

@warpspeedscp

3 ай бұрын

​​​@@alquinn8576because even a slight change in density of the a ir within the litho stage could change the refractive index of the air. And density can be changed with even the slightest push in any direction

@weirdo8435

3 ай бұрын

@@warpspeedscp so this is how tracking device work in alien movie. :D "micro changes in air density"

@alquinn8576

3 ай бұрын

@@warpspeedscp makes sense, thanks

@ivoryas1696

3 ай бұрын

yibosun4091 r/Newsentences

I work in a cleanroom assembling these machines for ASML. We hold tolerances in microns and this video gives a good explanation of just why we do that lol

@nen439

3 ай бұрын

Lol, miss those tolerance stack up analysis.

@lucasrem

3 ай бұрын

less tolerance is needed for these new nodes, my Family was Nat Lab in the early days, TU e too

@chronokoks

3 ай бұрын

how much do they pay an hour? I contract guys for like assembling vacuum machines for coating glass and etc and they pay us for the guys around 40 euros an hour.

@taylorkaplan2614

3 ай бұрын

I thought the tolerances were less than a nm?

@chronokoks

3 ай бұрын

@@taylorkaplan2614 Tolerances for assembling the machine from X amount of components and the tolerances that the components while working can achieve is a different thing.

I worked with a former ASML mechanical engineer for a while. He was of the opinion that the ASML stage is a masterpiece that has held up for decades and generations of machines, and he obsessed over specifications I have never heard of. Fantastic stuff

They do all this so I can watch my NETFLIX. Thanks for your efforts ASML.

@kylekorona

3 ай бұрын

I use my phone to watch gay porn

@halavich9672

3 ай бұрын

They do it for profit😅

@relo999

3 ай бұрын

@@halavich9672 But they get their money by giving this man the ability watch his stories. Without giving the man access to his stories, the man wouldn't give them his money and without the mans money there wouldn't be profits.

@XShollaj

3 ай бұрын

​@@halavich9672The reason they profit, its cause their offerings are extremely valuable in the first place

@TurdBoi-tf5lf

2 ай бұрын

​@@halavich9672🥰

The technology behind this is (to say at least) insane. My dad worked at RIZ semiconductors in Yugoslavia, they made transistors and ICs. He regularly talks about his days working there and how interesting and good it was. He was very sad when company shut down before the war and he never recovered from it. I can imagine how happy he would be if they had something like this in factory.

@teoextreme

3 ай бұрын

I remember the first time when I asked my parents "What's this old ruin here?", and when my mum told me that they used to make microchips here I of course had no idea what that is at a time, not until about a decade later, and nowadays... it really hurts whenever I remember that our country no longer makes ICs.

@ivoryas1696

3 ай бұрын

themrworf1701 _-Rizz-_- semi-conductors?- I'm... I'm sorry...

@taiwanluthiers

3 ай бұрын

Now I just need someone to make a AN6680 IC. I doubt TSMC would copy it.

@DS-pk4eh

24 күн бұрын

Do you have any info what ICs they were making? I was searching for what was made there, but only have from Iskra and EI Nis

The hydraulic backstory of early ASML is really fascinating. Little historical lessons like the chip manufactures rejecting ASML equipment make for powerful stories to understand and explain decisions you'll need to make in the future. Great video!

@lucasrem

3 ай бұрын

the later magnetic system, as Chessmaster, moving the pieces for you ;)

Fun fact: I grew up in the city of Eindhoven and the Philips Natlab lays in the cities district called “Strijp” when Philips moved out of Eindhoven with all their manufacturing facilities this part of town became like a ghost town. The municipality of Eindhoven invested heavily in the district for the past 10 years or so and it now houses many restaurants, cafes and foodhalls. The old Philips factories have been converted into apartments, offices spaces, start-ups and the district really became a new hotspot for the city.

@LanteanStargater

3 ай бұрын

The old Natlab is the current High Tech Campus, the buildings still exist and are still being used, not sure where the association with Strijp comes from

@lucasrem

3 ай бұрын

Stijp is not Nat Lab, but it started there, in the boiler room at Stijp, the early development was there. Het Kolenhok was niet meer nodig.

@lucasrem

3 ай бұрын

@@LanteanStargater we need to make content here for him, the boiler-room at Stijp etc

@relo999

3 ай бұрын

I worked in Strijp for a while for a start-up. Cool place, though far to industrial and urban (and southern) for my taste and hilarious to see burgerking and coke sponsor the sportsday for elementary school on the fields next to the building. Reminded me of seeing smoking sponsorships for sprint matches back when advertisement of smoking was still a thing. For me Strijp had a really mismatched feeling with it being somewhat rundown and highly industrial while being rebuild and reused to be "hip" and approachable. Like a part of town that has an identity crisis, maybe that has changed in the last 5/6-ish years. Still miss the greek food from there, that was one of the best take-away greek food I ever had.

@b-je1ko

3 ай бұрын

Has ASML moved away from Veldhoven? I know people often interchange Eindhoven and Veldhoven when referring to ASML's location, where are they now located? Could use a glass of Dommelsch.

The thing that really makes my head 🤯is that the wafer and reticle are in motion during the exposure. They move opposite directions with a tiny slit between them such that only a narrow line of the image is projected onto the wafer at a time. The relative motion of the two needs to match exactly so the reticle image lines up with the correct part of the wafer. So that crazy 1nm overlay spec that you were probably thinking is a "line up and hold it still within 1nm" is actually "drive the wafer and reticle in opposite directions while accelerating at 20Gs and do not allow the speed of either the reticle or wafer to deviate by more than 1nm from it's predicted x or y location at any point along the path."

@ArneChristianRosenfeldt

3 ай бұрын

The lens scales down. The reticle only needs 4nm precision.

@liesdamnlies3372

2 ай бұрын

@@ArneChristianRosenfeldt “only” XD

@adolfgerhardhermann5952

Ай бұрын

@@liesdamnlies3372Me baking waffels to only 7nm precision. Old technology, my bad.

Fifteen kilograms. For an easy point of reference, that's the same weight as twenty-six Cornish piebald hissing marmots.

@vectoor91

3 ай бұрын

Thanks, that really puts it into perspective.

@TurdBoi-tf5lf

2 ай бұрын

xD

@tonyduncan9852

23 күн бұрын

Cryocool.

I worked on these tools for 15-16 years at various sites. From. 2500s, 5500s all the way to NXTs. Left ASML in 2018 to live a more peaceful life in the Philippines. Working under pressure to deadlines, to customers watching your every move, I have not regretted my decision. I am out of the rat race. As they say, money isn’t everything

@infiniteloops1879

3 ай бұрын

Wow what a story!

@love2fly558

14 күн бұрын

Hear hear! I worked for Canon USA several years. Worked up to the 248nm steppers and the very beginning of the 193nm step and scan. I left because these tools were getting too complex and got tired of field service travel. I’m still in the industry but with an analog device company which uses 365nm i-line like the i1 shown in the video and their next gen air bearing stage models, all 90’s technology. Still complex but relaxed specifications, the biggest headache is finding reliable parts.

@hrldoliente1

14 күн бұрын

@love2fly558, yep. I actually started on those i lines at ASML, single stage steppers. Definitely, a lot less complex, albeit only slightly. Then worked my way up to those monstrous 193nm Twinscan NXTs in OR. I don’t miss any of it, honestly. I just do mostly honey-do lists here in the blistering heat of the Philippines. It’s way better than being watched like a hawk by a new PhD grad who has no idea how things work in reality, LOL.

@love2fly558

13 күн бұрын

Yeap, I remember hearing about the Twinscan when I was in Canon USA; back when ASML, Canon and Nikon were always competing for number 1. I got lucky with this analog company. The fab is small and I’m the only one that knows the steppers well. I set the qualification tests for production, set the specification limits and design my own PMs. I don’t go to meetings and managment pretty much leaves me alone. It is a double edged knife, because they keep texting me for help during my weeklong vacations.

@hrldoliente1

12 күн бұрын

Hahaha. I hear your pain brother. When it was still pagers, I hated it as well being called on my days off. I actually was in the northeast back early 2000s working remotely. I dreaded that company pager. Then came the cell phones and of course, it became a direct call from management. Good for you though, smaller fabs are actually the best. As long as everything is running, you won’t be bugged. Big customers are always the biggest PIAs. I was at TriQuint once too, one of the guys who kept the place afloat. They pretty much kept their distance because only the FSEs knew how to keep the steppers working. Anyway, for me, I think I am too old to go back to the semiconductor business. Can’t crawl under those tools anymore without getting vertigo hahaha. It’s a young man’s game now. Take care

Fantastic video containing a lot of details I wasn't really aware of. Thanks for making this!

@Asianometry

3 ай бұрын

Glad you enjoyed it! I love your work too

So fun to see the ASML videos. It is interesting to see what has and has not come passed the walls of our company. As someone that works in their learning department these videos are great inspiration. Keep it up!

I love your litho videos bro I’ve seen everyone at least 5 times. Your videos are the only ones I have found that go into great detail about every process and very easy to understand. This semiconductor field just fascinating and boggles my mind

@ivoryas1696

3 ай бұрын

HostilityXBL Hear hear!

YES! more videos on how the ASML machines actually function please!

@solidfuel0

3 ай бұрын

Chinese spy 😂

Just this last year we got rid of two new-to-us pas 5500 ASML steppers. They were used as initial process development demonstrators and have been replaced by much newer double-sided alignment capable machines. Good luck to the next folks who find those 5500s as new-to-them.

@SuperCuriousFox

3 ай бұрын

As someone maintaining a PAS 5500 myself, I’m sure whoever receives these will be quite happy with them.

Great job documenting ASML technical history, old Philips guy here. mounted the lasers on sharks, less error when you reverse that, lol

Always wondered how they could realign the wafer with insane precision...

@nextlifeonearth

3 ай бұрын

The answer is lots of sensors, accurate linear actuators and lots of PID control. And some magic numbers. With some I mean a lot.

@tHaH4x0r

3 ай бұрын

@@nextlifeonearth You are mostly wrong, there's no sensors, actuators and control involved in the alignment of wafers. The principles on which realigning is done are called kinematic mounts. Those restrict the degrees of freedom such that there's only 1 'viable' solution for the wafer to sit. However, with nm positioning lots of other factors come into play there such as nesting force and micro-slip, which is an entire field of research by itself. If the chuck is aligned (almost) perfectly with the stage every time, you only need to align the stage with the frame once, and only need to care about the relative positioning of the chuck w.r.t. the measurement frame.

@andrewphillip8432

Ай бұрын

@@tHaH4x0r Are you sure about that? Kinematic couplings don’t work reliably for nm alignment. Plus you can literally see that the positioning system is based on linear motors, a magnetically levitated stage, and interferometric encoders. Plus the machine has to compensate for the thermal distortions in the wafer itself.

@MrDehicka

Ай бұрын

​ @andrewphillip8432 Yes, looks like it is 2D linear motor with feedback from interferometric encoder with 2D zeroglass gratings on the bottom (like former Sony Laserscale, now DMG Magnescale). It has insane 6 picometer resolution, but to get positioning accuracy below 1nm there must be a hell lot of corrections and calibrations.

@tonyduncan9852

23 күн бұрын

And now you still wonder - I suggest.

Your essays on anything litho tech are my favorite by far...we would love a deep dive on all subsystems! This video was epic! Keep up the excellent work as you have many fans!

I've designed and built quite a few motion systems for this industry. This is a great summary, thank you! I love your videos, first time commenting, just had to say it!

@jagadishk6030

5 күн бұрын

hi

I found this so interesting! Moving 15kg with nanometer precision in 6 degrees of freedom with about 20g of acceleration is just extremely impressive! Not to mention training all the sharks for the laser metrology job.

One of the most awesome wrap up I ever saw. I work in a little fab producing low grade reticles and love your channel!

Correction on your throughput statement at 10:06. 125 wafers per hour is about two wafers per minute, not one wafer every two minutes. This isn't the only time you make this error in this video.

@trumptookthevaccine1679

2 ай бұрын

Shut up lol

@x7j4

2 ай бұрын

He’s good at making a video but bad at math. I noticed that too so came to the comments to see if anyone else noticed.

@adembavarsi7661

2 ай бұрын

I wanted to write the same comment thx!

Great to hear non-food channels giving the shout-out to Jiro Dreams of Sushi. I lucked out when somebody recommended it to me a decade ago. I found the commentary track great too!

Great video! You described yet another part of the ASML lithography machine that's way more complex than I ever imagined. I was previously aware that they use plasma lensing which already sounded insanely hard to pull off but I didn't know they use magnetic levitation to move the target object, too!

All your videos are 5 star videos. This one is a 6 star....Just brilliant!!!! Loved the technical details and the history / context provided...

So interesting and amazing. The precision is mind boggling.

honestly i watch your videos to fall asleep and they're great at that, soothing. plus i learn new things

Thank you for the video! We at EVG Group also are very experienced dealing with overlay in the nanometer scale. Mostly doing bonding but also lito. We are also ALWAYS hiring :)

Magnets, how do they work!? A man of culture ic lmao

13:24 -- "Magnets, how do they work?" The Juggalo in me applauds you, well played sir!

@rem9882

3 ай бұрын

It was perfect. He should be invited to Jaggalo island

@sc9604

7 күн бұрын

This comment send me down a rabbit hole and I am more confused than before. What is the reference here?

It’s always fascinating to realise that to make a newer, better version of a tool, it’s usually necessary to use the previous iteration tool. Example, to manufacture a lathe we need a lathe. To create a new version of a compiler software, we need the previous version of the compiler. To create a new lithography machine we need a previous lithography machine that produced parts for it

Fabulous video! The positioning technology reminds me of how the primary mirrors were "tuned" on the JWST. Different, using screws and cams, but equally accurate.

Came for the lithography, stayed for the face reveal

@andymetzen

3 ай бұрын

I don't think that is a real face reveal, since we know Jon is asian, half Taiwanese and half Hong Kong.

@100c0c

3 ай бұрын

Half Taiwan half HK? So Chinese? Land makes no difference​@@andymetzen

@Quazgaa

3 ай бұрын

bro lmao these replies are the best

@andymetzen

3 ай бұрын

@@100c0c According to genetic research, Taiwanese is definitely not Chinese, try again wumao

Great video! Such amazing developments in lithography. I remember doing manual alignments back in the early 1970’s

very interesting, Jon. Thank you - Happy New Year!

Your deadpan delivery is so perfect, I almost missed the "lasers mounted on sharks" joke.

"one last time". NO. PLEASE. You'll always find amazing things to say and this subject/domain is crucial and fascinating so please go on and on and on 🙂

Excellent movie, as usual. Your research is great and I learn and in each of your flicks. Thank you.

Great content. I learned a lot about steppers and scanners I didn’t know here. However, at around 2:00, i'm not sure I follow what you mean by: “In the early days of the semiconductor industry, the whole mask contained the whole design. But as the designs got more complicated, the industry started using ‘reticles’, which represent a portion of the whole chip design.” “The whole mask contained the whole design” makes it sound like early processes only required a single mask, which as far as I know has never been true. The 1971 10um process required 6 masks, and earlier processes would still have required multiple masks at least for active areas, gates, and interconnects. Or, the other way to interpret what you said here is, I think, that on early processes, a single mask was able to expose an entire WAFER in one shot. This was possible when wafers were small and masks were large, and was generally available, I believe, through 4” (100mm) wafers that were in use through the 1970s. The entire wafer could be imaged on a single mask (one mask per layer), including multiple instances of the chip design that was being created, for as many chips that would fit on a 4” wafer. But by the time 6” (150mm) wafers came around in the early 1980s, steppers were introduced that required reticles, where each reticle also contained potentially multiple instances of a chip design (one reticle per layer), but then the reticle was stepped across the wafer, such that each reticle only represented a portion of the entire WAFER, as opposed to “a portion of the whole chip design”. Is that what you mean by those statements? Seems like some terminology like wafer, chip, and design are being used interchangeably, when they shouldn't be.

@mith5168

Ай бұрын

100 mm not 100cm…

@JoeLion55

Ай бұрын

@@mith5168thx fixed

You are hilarious. I can't imagine better alignment of joy and precision in the subject matter.

A talk about movement in an ASML Lithography Machine, without mentioning ASML's supplier Prodrive Technologies? It is often joked how ASML (and it's campus) is on one side of Eindhoven and Prodrive (and it's campus) on the other side. I visited Prodrive a couple of months ago. They had one of those evenings where they lure in developers and engineers with free pizza and beer and a very interesting talk about how they have developed their own Git for FPGA code, and hope some will apply for a job. And we got a tour. I've seen those FPGA racks and they are indeed very impressive.

You cover such fascinating topics on this channel in such amazing detail. I very much appreciate your content.

Love your ASML videos!!! Please keep them coming!!!

There are pneumatic stage working in vacuum, you just need to locally create an air film and remove all the air leak from side using multiple stages of differential pumping. Seems crazy but it works. in fact these are some of the most precise stages that can achieve nm precision without using long-short stroke stacking. Such know-hows stay almost completely in Japan though.

Man is the greatest machine ever created There must be a creator for this creativity

Incredible video, idk what's more impressive- what the machine does, or the humans who made it.

thanks, i can advance in building my DIY litho home machine !!

@Redfvvg

3 ай бұрын

I will be glad to get acquainted with your thoughts on this matter. I'm thinking about this question myself.

@lulalelilo

3 ай бұрын

This was a joke, i don't think it is doable without a team of engineers AND a bunch of money to create the parts for it@@Redfvvg

This is really interesting stuff. I'm constantly amazed that ASML essentially have the industry all tied up. This is also the second video I've seen today that talked about interferometers and both said the word very differently 😉

Thanks for some extra inspo for my presentation tomorrow on optical lihography

Ok now I discovered that exists a creature called Grizzled Tree-Kangaroo, also interesting to know that its weight is equal to a wafer 🤣🤣 I love the way you sometimes put a joke inside the video like it was a serious argument LOL

THIS 👍 thank you for making this (and all your other..) fascinating videos.

i feel very proud watching this video, i own the NXT WS design at ASML. Great Video Asianometry, love the content.

@gauribadukale2397

2 ай бұрын

Hey I am very interested to know what you mean by you OWN that design like isnt it a team effort, I would really like to know more on your contributions on device.

Thank you for comparing the wafer stage to a grizzled tree kangaroo, it really helped put things into perspective

Chip making has become impossibly awesome. The evolutions have been mind blowing

Fun fact, in the early 2000s Philips produced their own logic chips on 200mm with Nikon steppers using spindle driven stages.

A small correction: Timestamp 15:02: The wafer stage holds both position module chucks. There's no way the wafer stage has 15 Kg. I don't have an exact number for you but I can tell for sure that only a positioning module (which holds the wafer table) has around 50-70 kg.

@kalliepaulsen9814

3 ай бұрын

I can, with 100% certainty, verify this having to swap one recently😅

Excellent research on this topic.

Strange that they don't use piezo actuators in any stage. Piezo actuators are used in atomic force microscopy and they are can move objects within distance of atom.

@QwertyQwerty-bd3tm

12 күн бұрын

Well, ASML is actually doing research in this field.

I have really quickly grown to love this channel. I am fairly well rounded in my knowledge due to being an autistic science nerd, I also am very well versed in much of the mechanics covered with microchips, but my god do I feel like I know so little when hearing some of these videos. I don't mind that, ill catch on, but thank you for bringing out this feeling that I havent had in a long time.

While its obviously on a totally different scale this discussion reminds me a lot of what I've heard about how core XY 3d printers work, including vibration and harmonic compensation, though they rely much more on the software side to avoid needing such specific mounting, heavy weight, and expensive extremely rigid construction. Given the related concepts at a muxh more approachable scale I thing seeing a video on them from this channel could be very interesting.

@xilw3r

3 ай бұрын

There is an unbelievably larger amount of software and all sorts of crazy compensations in the lithography machines (down to frame *creep* compensation lol), there is really no comparing them to a printer, besides the fact that you can find probably find stepper motors in both. Actually Im not sure that you will find steppers in modern litho machines.

This is mind blowing technology! Great video and presentation, thank you!

I thought it was funny that the air bearings involve the wafers “floating” on a granite slab. All these wicked complicated polymers and materials and chemicals, and they use a rock to glide the wafers around

At 13:05 the big move to vacuum was not just cleanliness requirements, it's that air absorbs EUV.

That was great. Love your work.

using the "air hockey" design in a vacuum is actually possible. IMS and JEOL do that and they have the same specs for accuracy

I'll never be able to unsee kangaroos sliding around inside ASML.

@DemPilafian

3 ай бұрын

At least they are metric kangaroos instead of those ridiculously inconsistent imperial kangaroos.

Have some still working ~1mkm soviet made systems for lithography on 100mm wafers. 1-stage, air floating table driven by 3 lasers for positioning and 4 electromagnets for movement. It's really complicated even at this level of technology. I can't even imagine how scary everything is there right now.

As a beginning DUV engineer your videos on lithography are very interesting and actively help me in my work. Thank you for that. As a request: could you look at the old systems and their modern use? I know of some very old ASML PAS systems which are still running this day, even though their technology is from the 1980's.

We used piezo based motors for precision positioning back in the day.

1.2 billion lines of code. wow. cant imagine the testing involved. thank you for sharing knowledge

references to both jiro and ICP in one videos, thumbs-up my dude

This video that you released. Is the very best way to explain how chips are made. The accuracy! Well never understand.

Fabulous analogy comparing the process to Jiro's sushi workflow! 🐟🍣

Your videos are always quality.

Nice video as always >85% correct. 12:16 EUV does not exist in Air, this dictated switch to vacuum. Neither does eBeam (maskless photolithography...). I find it is easier to manage particles in air with proper airflow and low wear or dedicated particle traps/evacuation techniques. In vacuum you have no medium to manipulate the particles out of the way. You can mostly focus on not creating them in the 1st place.

@ciano5475

3 ай бұрын

He said in the video: for EUV air bearing don't work in vacuum so they switched to magnetic levitation.

@nickj2508

3 ай бұрын

I may have missed that, but air bearing in vacuum does exist. Air bearing flow is very small and be overcome with additional pumping capacity.

Magnets how do they work?

The main difference between the XT and NXT machines are actually the wafer stage, going from air bearing to magnetic levitation, and interferometer-encoder system for stage align. There are also variants of XT machines that use ArF DUV light, and even immersion, but less commonly used.

haha I'm not so sure mate, I don't think this is the last time you will have to recap the workings of a lithography machine, looking forward to the next video!

brillant documentation, thank you.

I don't know how the latest machines do it, but when I worked at ASML in 1998 (during the early days of the TwinScan when TwinScan was still called Atlas), the way that the machines avoided vibration was by having some counterweights that (although they weren't mechanically connected) moved around in opposite directions of the reticle stage and wafer stage. In those days, the motion control system ran on a rack of custom-made computers based on Texas Instruments DSP's that controlled the 20+ degrees of freedom all at the same time.

The race circuit shown is Circuitpark Zandvoort. A coastal track in the Netherlands.

i feel like a genius when i wire 1 led and it doesnt fry, the sheer complexity even through the lens of my humunculi level of mind, fucking blows my brain to nano metre sized higss boson sized confetti bits..mhyvtw45rtyujhbvcser

This video is just the tip of the iceberg. I work on the Canon steppers. On the Canons, not only the XY stage needs nanometer accuracy, but there’s also a Z-tilt stage that needs to move the wafer in Z and XY tilt accurately for precise focus. The projection lens need to be free of any imperfections to minimize aberrations. They also have computers, internal networking and much electronics and control systems. Like hrldoliente1 wrote, these tools are very complex and stressful to work on. I settled for an analogy device company that uses 90’s steppers, still complex but relatively relaxed specifications.

Had to take a double take when i saw the logo of my old university at 1:00 😃 Cool that you credit the sources 👍

This was the part of these machines that is unbelievable.

We worried about my 3d printer vibrations and then this video 😂

I love FPGA tech so it would be great when you talk about these machines' software/algorithms that you would detail how they are implemented across industrial computers, programmable logic, and purpose-built ASICs.

so strong compilation, thank you

As soon as I saw your new video dropped I made a hot cup of cocoa with some marshmallows and sat down to watch this ❤ You genuinely enlighten my mind every single time I watch your work. Thanks for turning your passion into something genuinely interesting, entertaining and enjoyable to watch. Hope you have an awesome day ✌️

@theblackhand6485

3 ай бұрын

Oh I grabbed a Dr. Foots and tortilla chips!

Nice, thanks a lot for making this

00:07 ASML machine must position a wafer precisely within a few nanometers for exposure. 02:11 ASML lithography machines use a reticle and objective lens to transfer a chip's design onto a wafer. 04:15 ASML evolved from Philips in the Netherlands 06:17 ASML's TWINSCAN platform enables precise maneuvering and exposure of silicon wafers. 08:16 ASML's TWINSCAN machine revolutionized lithography processes with dual-stage setup 10:06 Lithography machines move wafers with precision and speed. 12:00 ASML lithography machines implemented aerostatic systems to reduce friction and vibrations during wafer stage movements. 14:05 NXT immersion systems have reduced metrology laser travel and improved overlay.

I found this deeply interesting and would love to know more around this topic

Maybe next step in IC production is to replace wafers with some other techonolgy... it would be great some sort of continuous prodcution line as in glass or aluminum industries

This shows again how easy it is to think you know something without doing proper research. Thank you for correcting me.

How about a video on the TWINSCAN EXE:5000. That machine blows my mind! It is so huge!! I got to see it in person - what a beast!

It's easy to move something by exactly 1 nanometer. Just put your fingernail on the side and wait 1 second.

How the brilliant mind created this from the very beginning is incredible enough.

This is nuts! Very impressive.