The requirements in semiconductor manufacturing are becoming ever more complex, as node sizes are getting smaller and the demands for performance increase. The innovative and broad portfolio from Festo is geared to helping semiconductor manufacturers overcome these challenges. State-of-the-art piezo technology from Festo is best in class for precisely regulating the pressure and flow of inert gases and minimizing particle generation. In addition, its reduced energy, gas and air consumption saves costs. Motions that were once considered impossible with pneumatics can now be realized using a combination of precise pressure and sensing capabilities.