Butterfly pivot designed at CSEM by Henein and Spanoudakis
Жүктеу.....
Пікірлер: 3
@phillipreay6 ай бұрын
Very nice.
@pascalvernooy37786 жыл бұрын
Hey Christophe, For a project I've to construct the mask allignment for a wafer. For X and Y displacement it is almost finished, but I also need to do the Z rotation. It has to be done with hinges like your nice concept. Do you have any drawings of this device that I can use. Thanks in advance
@cyamahat
3 жыл бұрын
You may find all useful information for the caluclations in this article: www.researchgate.net/publication/254060012_High-Angular-Range_Electrostatic_Rotary_Stepper_Micromotors_Fabricated_With_SOI_Technology
Пікірлер: 3
Very nice.
Hey Christophe, For a project I've to construct the mask allignment for a wafer. For X and Y displacement it is almost finished, but I also need to do the Z rotation. It has to be done with hinges like your nice concept. Do you have any drawings of this device that I can use. Thanks in advance
@cyamahat
3 жыл бұрын
You may find all useful information for the caluclations in this article: www.researchgate.net/publication/254060012_High-Angular-Range_Electrostatic_Rotary_Stepper_Micromotors_Fabricated_With_SOI_Technology