EUV Lithography. But With a Free Electron Laser

Notes
- I am an idiot. When expanding the laser acronym, I forgot the last part - "of radiation". I deserve to be Lased.
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Пікірлер: 530

  • @chalkchalkson5639
    @chalkchalkson56398 ай бұрын

    Greetings from the Center for Free Electron Lasers at DESY the home of the european xray free electron laser ! It's really cool to see FELs on youtube and crazy to have the video actually talk about SASE. I personally mostly work with undulator light from the petra synchrotron, so take what I say with a grain of salt. Some issues with XFELs: - you need really nice beam parameters for sase to work and seeded fel isn't feasible for xray photons - they are fucking huge, european xfel is a >3km long line! compare that to high brilliance synchrotron with undulator beamlines like petra III at 730m diameter - repetition rate is hard some of the really really cool shit you probably couldn't talk about because of length: - the light is in phase, so you can do some really fancy optics stuff with it and get intensity proportional to N² instead of N (where N is electron number) - there are two different regimes for the self organisation. instead of injecting electrons that are monoenergetic but spread out in phase space you can also inject them with a wide energy spread in an ultra short pulse. That's one of the things people are trying to do with laser based acceleration systems. Ultimately I'd guess that FELs won't do lithography in the super near future, just because time averaged intensity matters more than peak intensity. European XFEL SASE1 has 27kHz time average repetition rate with 4mJ energy per pulse. That's only slightly above 100W! From a billion €, kilometers long device that only went online a few years ago. Petra's P61 beamline alone puts out more power than that (I've seen samples with holes melted through them by that beamline), admittedly that one has a wider spectrum, but you get what I mean. The size / capital investment to power ratio is pretty bad for FELs still. source: www.xfel.eu/facility/instruments/spb_sfx/instrument_design/index_eng.html#:~:text=These%20pulse%20trains%20can%20be,repetition%20rate%20of%204.5%20MHz.

  • @plainText384

    @plainText384

    8 ай бұрын

    The MuCLS is an even smaller sychotron-like X-ray source, just 5m x 3m, but I have no idea if it's suited for Lithographie. Still an interesting look at the other side of the extreme for monochromatic X-ray light sources.

  • @pavelnikulin8240

    @pavelnikulin8240

    8 ай бұрын

    Normally, coherence is undesirable for a lithography light source

  • @TroyRubert

    @TroyRubert

    8 ай бұрын

    Very cool!!!

  • @ArawnOfAnnwn

    @ArawnOfAnnwn

    8 ай бұрын

    @@stormsj SSMB?

  • @davidding8814

    @davidding8814

    7 ай бұрын

    @@ArawnOfAnnwn Steady-state micro bunching, which to put simply is a way to make synchrotron generated light useful for lithography.

  • @mattmichael2441
    @mattmichael24418 ай бұрын

    @14:03 “the current LPP approach uses 1.1 megawatts for 250 watts of EUV power” really put things back into perspective

  • @CharlesVanNoland

    @CharlesVanNoland

    7 ай бұрын

    Yeah current EUV is super duper power hungry because the reflective optics they use to bounce the EUV around for photolitho only each reflect ~70% IIRC, and after bouncing around a dozen or so times that means that only a super tiny amount of the EUV generated actually makes it to the wafer :(

  • @neu1414
    @neu14148 ай бұрын

    You mastered presenting technical topics. Rise and fall of inflections, jokes, etc etc. night and day difference from your dry early videos. Hell ya buddy, thank you for teaching us so much.

  • @Scrogan
    @Scrogan8 ай бұрын

    Free electron lasers are a really cool diy project. Deadly high voltages, vacuums, strong magnets, blinding laser radiation, and extremely dense beams of beta particles. Don’t know why they’re not more popular. Also the beam dump for an electron beam will just be some conductive surface that’s connected in a circuit back to the other end of the high-voltage source that accelerated the electrons out of the electron gun. Charges need to flow in a circuit, though when you’re dealing with free charges it can get kinda strange with net charge buildup.

  • @msimon6808

    @msimon6808

    8 ай бұрын

    Net charge build up? Get a bigger net. So to speak.

  • @entcraft44

    @entcraft44

    8 ай бұрын

    I guess it depends on the beam energy: You may require *a lot* of shielding around your nice conductive beam dump :) Actually, I wonder about the return circuit. E.g. for SwissFEL, the electron bunches are 200pC at 100Hz repetition rate, that's 0.02µA. You don't need a special return path for that, but grounding is of course essential.

  • @petergerdes1094

    @petergerdes1094

    7 ай бұрын

    They don't fail in spectacular enough ways for KZread.

  • @xenophobe3691

    @xenophobe3691

    6 ай бұрын

    I'd love to find some resources to make a diy fel

  • @mikelay5360
    @mikelay53608 ай бұрын

    Repurposed hadron colliders for purposes of manufacturing semiconductors is dope🔥

  • @submachinegun5737

    @submachinegun5737

    8 ай бұрын

    Hearing about the insanity behind previous generations of fabs was crazy when I first found this channel but now imagine saying to a random person “yeah that phone chip was made with a particle accelerator”. Crazy tech

  • @benjaminguest6231

    @benjaminguest6231

    8 ай бұрын

    Look up Ion implantation. Its a particle accelerator firing toxic chemicals to manufacture semiconductors.

  • @MiggerPlease

    @MiggerPlease

    8 ай бұрын

    OMG I'm gonna come my nigga one😮😮😮

  • @miinyoo

    @miinyoo

    8 ай бұрын

    Synchrotron radiation has been around for what 6 or 7 decades? Sure, the machines are big but there's really nothing stopping anyone from making them smaller and more efficient. Synchrotron radiation is smaller than 13nm and has properties wholly different than it's neighbor EUV.

  • @shanent5793

    @shanent5793

    8 ай бұрын

    Electrons are much less massive than hadrons so simpler accelerators are better

  • @deshazo_henry
    @deshazo_henry8 ай бұрын

    "REDACTED" 😂 I laughed so hard and abruptly I scared my 🐈

  • @bobblum2000
    @bobblum20008 ай бұрын

    This looks quite good: High-power EUV free-electron laser for future lithography by Nakamura et al (2023); here's the abstract: The development of a high-power EUV light source is very important in EUV lithography to overcome the stochastic effects for higher throughput and higher numerical aperture (NA) in the future. We have designed and studied a high-power EUV free-electron laser (FEL) based on energy-recovery linac (ERL) for future lithography. We show that the EUV-FEL light source has many advantages, such as extremely high EUV power without tin debris, upgradability to a Beyond EUV (BEUV) FEL, polarization controllability for high-NA lithography, low electricity consumption, and low construction and running costs per scanner, as compared to the laser-produced plasma source used for the present EUV lithography exposure tool. Furthermore, the demonstration of proof of concept (PoC) of the EUV-FEL is in progress using the IR-FEL in the Compact ERL (cERL) at the High Energy Accelerator Research Organization. In this paper, we present the EUV-FEL light source for future lithography and progress in the PoC of the EUV-FEL.

  • @akka2011hk
    @akka2011hk8 ай бұрын

    I suggest you looked at TsingHua University's SSMB (Steady State Micro Bunching) to generate DUV, EUV and soft X ray.... all in one. China is already building an EUV factory at Xiong'an New Area in Heibei. 😁

  • @stormsj

    @stormsj

    8 ай бұрын

    Yep and per another comment here that likely has more time averaged power than FEL anyway as that seems to be main reason for study of SSMB... increases time averaged output.

  • @VanDuc-hm6sp

    @VanDuc-hm6sp

    8 ай бұрын

    Definitely..but he is Too "Reducted" to tell Us...😂😂😂

  • @yexela
    @yexela8 ай бұрын

    Electrons are not attracted towards the magnetic poles :) their path is just curved perpendicular to the magnetic field (the oscillations are actually in the plane perpendicular to your undulator picture at 7:55).

  • @P-B-G_YT
    @P-B-G_YT8 ай бұрын

    6:00 When I was a teenager back in the late 70's, I wrote out by hand, from the Encyclopedia Britannica Jr. the section on Laser. I remember Laser: Light Amplification by Stimulated Emission of Radiation. Please don't omit the "Radiation" part.

  • @franzliszt3195
    @franzliszt31958 ай бұрын

    A couple of days ago China announced its building a cycotron as big as two basket ball courts for chip manufacturing.

  • @MrSpiritmonger

    @MrSpiritmonger

    8 ай бұрын

    Synchrotron SSMB EUV in Xiongan by Tsinghua University to be ready by 2026-2027. Epic.

  • @franzliszt3195

    @franzliszt3195

    8 ай бұрын

    What in the USA doing? Biden pushed through billions of dollars to chip companies. How many Synchrotrons are in the plans?@@MrSpiritmonger

  • @richardque4952

    @richardque4952

    7 ай бұрын

    Wonder how big gonna look.

  • @chris-tal
    @chris-tal8 ай бұрын

    Talking about getting the "Semiconductor Avengers" together, this at this point start to look even more complex. On the level of fictitious Black Mesa research complex. This will cause a large overhaul on floor planning too when trying to protect equipment from disaster scenarios (floods and earthquakes) and floor costs when putting in laser redundancy. I can almost here the quote: "I never thought I'd see a resonance cascade, let alone create one." 🙃

  • @j100j

    @j100j

    8 ай бұрын

    "Gordon doesn't need to hear all this, he's a highly trained professional!"

  • @mariusj.2192
    @mariusj.21928 ай бұрын

    A magnet doesn't attract electrons. Electrons are deflected by the magnetic field perpenticularly to the magnetic field, not towards it or away from it. So in your picture they would swerve in and out of the picture plane.

  • @shanent5793

    @shanent5793

    8 ай бұрын

    An electron travelling straight down the centre wouldn't be accelerated at all because it's parallel to the field. Off-center electrons would oscillate like an airplane changing the direction of rotation mid-barrel roll

  • @arthurschildgen5522

    @arthurschildgen5522

    8 ай бұрын

    Well you might be right, but Sulla>Marius so ur opinion is invalid.

  • @defeatSpace

    @defeatSpace

    8 ай бұрын

    @@Danji_Coppersmoke you almost made my day

  • @jimmyrichards5595

    @jimmyrichards5595

    8 ай бұрын

    I was wondering if “perpenticularly” was a word I’d never heard of. I tried looking it up and didn’t find such a word, so far. This has me thinking that you perhaps you meant to type “perpendicularly”?

  • @entcraft44

    @entcraft44

    8 ай бұрын

    @@shanent5793 I don't think you have the correct magnetic layout in mind. In the layout shown the magnetic field lines will go up and down alternately, and the electrons will in turn curve in and out of the screen plane. This is also true for electrons moving straight down the center of the undulator.

  • @jubechen
    @jubechen8 ай бұрын

    Can you imagine that once free electron laser is down, you will also bring down a whole fab

  • @danmenes3143
    @danmenes31438 ай бұрын

    6:38, a slight correction on the meaning of "stimulated emission." Stimulated emission refers to a process where an excited electron can become sort of a photocopier for photons. When the electron is excited (technically I think this is called the Avatar state), and an external photon interacts with it, then the electron is prone to emit its energy as a second photon traveling in exactly the same direction with exactly the same wavelength, phase and polarization as the incident photon. This is why the laser emits all of its photons in a narrow beam at effectively a single wavelength.

  • @ThePowerLover

    @ThePowerLover

    8 ай бұрын

    This!

  • @Vexlia.artist

    @Vexlia.artist

    8 ай бұрын

    Yeah, really important thing which makes laser not just fancy lamp. We get over this so much on the lectures I usually don't even pay attention towards explanation in videos. Also he missed "Radiation" then explaining acronim/word "Laser", which little weird.

  • @entcraft44

    @entcraft44

    8 ай бұрын

    Slight correction to the slight correction: The wavelengths must already match anyways, they are a consequence of the energy level difference. But yes, the phase e.t.c. make it special.

  • @danmenes3143

    @danmenes3143

    8 ай бұрын

    @@entcraft44Thank you.

  • @hououinkyouma1458
    @hououinkyouma14588 ай бұрын

    I feel like this will be super popular when we develop space based semi conductor fabs.

  • @googacct
    @googacct8 ай бұрын

    You might want to take a look at new particle acceleration techniques based on lasers. It has the potential to do in a few meters what a linear accelerator takes a kilometer to do. It would not help with the undulator side of things, but it would help reduce the overall size of the FEL machine.

  • @GeoffryGifari

    @GeoffryGifari

    8 ай бұрын

    plasma wakefield accelerator? sounds super exciting

  • @jamesowens7176
    @jamesowens71768 ай бұрын

    This is crazy cool! Probably the future of photolithography!

  • @infinitumneo840
    @infinitumneo8408 ай бұрын

    I like the idea of using particle accelerators to create light at the energy needed for future lithograph. Some particle physist are working on very small particle accelerators that are the size of your hand. Perhaps this avenue can enhance our understanding of the quantum world.

  • @alexhajnal107

    @alexhajnal107

    8 ай бұрын

    I remember seeing the first cyclotron ever made (on exhibit at Berkeley). It's just 11 cm across and accelerated protons to 80 keV.

  • @Cristopherdreamer

    @Cristopherdreamer

    8 ай бұрын

    More on this pocket accelerator stuff?

  • @alexhajnal107

    @alexhajnal107

    8 ай бұрын

    ​@@Cristopherdreamer _(Note: Given the small size I'm assuming these are cyclotrons, synchrotrons, or the like.)_ The typical limiting factor in how fast one can accelerate particles is the magnetic field strength. The faster the particle moves the more inertia it has and the more force that is needed to nudge it into a curve. The tighter the curve the stronger the magnetic field needs to be. The first cyclotron could only achieve low energies (80 keV) because it used magnets recycled from telephone switch relays. With modern superconducting magnets one could achieve much higher energies. At some point though the limiting factor becomes the material strength of the magnets; too high a field strength and the magnets will tear themselves apart. The only solution then, barring advances in material science, is making the ring diameter larger. I've glossed over/skipped a lot of details but that's the gist of it. Maybe the OP could provide a pointer (DOI) to some papers covering current research in this area?

  • @jamessssssssssssssssssssssssss

    @jamessssssssssssssssssssssssss

    8 ай бұрын

    So not long until pulse rayguns

  • @Beregorn88

    @Beregorn88

    8 ай бұрын

    Sadly, when physics is involved, bigger is almost always better

  • @bestimmtkeinbot9793
    @bestimmtkeinbot97938 ай бұрын

    I learned the physiks behind a stimulated emission differently then your explanation. That it doesn't release a photon in a random direction but rather that if an atom gets hit by a photon while having one of its electrons exited at the exact same energy state then the incoming photon, it releases a second photon with exactly the same frequency and in the same direction then the first one.

  • @joachimkeinert3202
    @joachimkeinert32028 ай бұрын

    Great explanations, as always. Yet, in the undulator the magnets don't attract or push off electrons rather that deflecting them othogonally (in the picture to or from the viewer of the picture) to the magnetic field and orthogonally to the electron's trajectory. The resulting acceleration effect would be the same.

  • @diegoantoniorosariopalomin9979
    @diegoantoniorosariopalomin99798 ай бұрын

    I first heard about free electrón lasers in the context of light sources that china may use for euv machines, so i am very interested about the topic

  • @diegoantoniorosariopalomin9979

    @diegoantoniorosariopalomin9979

    8 ай бұрын

    Sinchrotrons and free electron laser are both simpler than tin láser produced plasma, so Many are speculating China Will use such a technology

  • @shaind
    @shaind8 ай бұрын

    So what the semiconductor industry ultimately ended up with is, in essence, a particle accelerator... What the heck.

  • @Summanis

    @Summanis

    8 ай бұрын

    Particle accelerator doing the thug shaker

  • @GeoffryGifari

    @GeoffryGifari

    8 ай бұрын

    *its all coming together* sooner or later machine learning is gonna end up there as well

  • @LanaaAmor

    @LanaaAmor

    8 ай бұрын

    ​@@Summanislol why do you have a picture of Indra as your pfp? 😂

  • @Summanis

    @Summanis

    8 ай бұрын

    @@LanaaAmor because he did cool things

  • @defeatSpace

    @defeatSpace

    8 ай бұрын

    They might _only_ be etching with electrons, but soon they'll be printing on wafers with boson inc.

  • @tykjpelk
    @tykjpelk8 ай бұрын

    They had one of these at the uni I worked at, or at least they did research on it back in the 90s to 2000s. It was able to emit a few mW at a 5 mm wavelength. They had some mathematical modeling for reaching kW powers but I'm not sure if they got that far before the building was demolished. Removing the room it was in reportedly took a week because it was absolutely radiation hardened and had very thick, reinforced walls.

  • @mz4637

    @mz4637

    8 ай бұрын

    That's good. Hopefully they replaced it with a transgender studies wing

  • @msimon6808

    @msimon6808

    8 ай бұрын

    @@mz4637 the transmission needs more respect.

  • @floodo1
    @floodo17 ай бұрын

    starts with a banger “recently I’ve been thinking about TSMC’s N3 process”

  • @luizpereira7165
    @luizpereira71658 ай бұрын

    I whould love to see a video about this new ssmb technique China is supposedly investing. Building a particle accelator for lithography, really? Can it be cost effective, compared to standard euv?

  • @MrSpiritmonger

    @MrSpiritmonger

    8 ай бұрын

    Could be... a single EUV scanner cost $300-400M dollars, whereas a Chinese synchrotron particle accelerator can cost $200M but produce dozens of EUV beamlines.

  • @Stroporez

    @Stroporez

    8 ай бұрын

    Except China was not given a choice between cheap advanced chips made by foreign tin EUV and expensive advanced chips made by domestic particle accelerator EUV. China was given a choice between expensive advanced chips made by domestic particle accelerator EUV or having no advanced chips at all.

  • @MrSpiritmonger

    @MrSpiritmonger

    8 ай бұрын

    @@Stroporez domestic LPP EUV prototype by CIOMP will be ready by end of the year or early next year, mass adopted within 3 years.

  • @michaelkeudel8770

    @michaelkeudel8770

    7 ай бұрын

    @@MrSpiritmonger they run about $50 million, the vacuum control system I've had to design for the AMSL EUV is around another $5 million, and then there's other support tools that are also required, and I couldn't tell you what they are since I've had no involvement on that side of the tool yet.

  • @ebx100

    @ebx100

    6 ай бұрын

    Odd how chip sanctions pushed China to go all out in the development on this technology. I remember how Russia sending rockets into space got America's space technology development go all out as well.@@Stroporez

  • @Hyo9000
    @Hyo90008 ай бұрын

    It will never be disappointing to stop using the LPP method. Tunability of the wavelength and higher power ceiling for the light source are groundbreaking changes. I hope we see the FELs in production before the end of the decade. That would be amazing.

  • @lubricustheslippery5028

    @lubricustheslippery5028

    8 ай бұрын

    The mirrors have to be specially constructed for the specific wavelength if I understand it correctly. Normal mirrors don't work for that short wavelength and that is one of the problems. So the mirrors are made with thin layers making the light reflect with a big loss. The layers have to be tuned to have the exact thickness depending on wavelength.

  • @msimon6808

    @msimon6808

    8 ай бұрын

    @@lubricustheslippery5028 The losses reduce as layers are added.

  • @agsystems8220

    @agsystems8220

    8 ай бұрын

    @@lubricustheslippery5028 Yes, but you could still have a single light source for multiple machines operating at different wavelengths, if you partition in time. Even if it was just for development purposes, being able to operate and tune a newer generation machine without having to build a whole new light source would be a big deal. Simply being able to experiment with different wavelengths cheaply would be a massive deal in it's own right. The different layer thicknesses for the mirrors would not be something manufacturers would need to develop new technology for, and while not optimal, the resists that work for 13nm should do ok for other high energy wavelengths. You could say 'lets try 40nm', adjust the light source, and switch out the mirrors, and it might just work. The possibility to introduce a cheaper alternative to EUV is also made available my this type of light source. Nothing is stopping us developing machines around something like 40nm light, for example. These would have far less stringent requirements in terms of mirrors and masks than 13nm, while also reducing the energy doses required 3x. They may not quite hit the same quality* as 13nm, but potentially could be much cheaper to operate. If a fab were able to shift 60% of steps to a cheaper process that would be massive in terms of output cost. Fabs do miracles with 193nm, so an intermediate step might be warranted, if it could be developed cheaply. * It is possible that they would, or better. Photoresists for EUV are activated as much by secondary effects as the light itself, so reducing the energy of those secondary effects might allow the lithography to be more accurate. The reduced requirements from mirrors would also make getting higher NA with the same manufacturing precision possible, clawing back some of the accuracy almost for free.

  • @agsystems8220

    @agsystems8220

    8 ай бұрын

    @@lubricustheslippery5028 Yes, but you could still have a single light source for multiple machines operating at different wavelengths, if you partition in time. Even if it was just for development purposes, being able to operate and tune a newer generation machine without having to build a whole new light source would be a big deal. Simply being able to experiment with different wavelengths cheaply would be a massive deal in it's own right. The different layer thicknesses for the mirrors would not be something manufacturers would need to develop new technology for, and while not optimal, the resists that work for 13nm should do ok for other high energy wavelengths. You could say 'lets try 40nm', adjust the light source, and switch out the mirrors, and it might just work. The possibility to introduce a cheaper alternative to EUV is also made available my this type of light source. Nothing is stopping us developing machines around something like 40nm light, for example. These would have far less stringent requirements in terms of mirrors and masks than 13nm, while also reducing the energy doses required 3x. They may not quite hit the same quality* as 13nm, but potentially could be much cheaper to operate. If a fab were able to shift 60% of steps to a cheaper process that would be massive in terms of output cost. Fabs do miracles with 193nm, so an intermediate step might be warranted, if it could be developed cheaply. * It is possible that they would, or better. Photoresists for EUV are activated as much by secondary effects as the light itself, so reducing the energy of those secondary effects might allow the lithography to be more accurate. The reduced requirements from mirrors would also make getting higher NA with the same manufacturing precision possible, clawing back some of the accuracy almost for free.

  • @davidk.d.7591

    @davidk.d.7591

    8 ай бұрын

    ​@@lubricustheslippery5028Carl Zeiss would probably figure it out

  • @wile123456
    @wile1234568 ай бұрын

    Thumbnail at a glance made me think this video was about toy trains lol

  • @lennoxbaumbach390

    @lennoxbaumbach390

    8 ай бұрын

    You weren’t too far off, lol.

  • @atejada320

    @atejada320

    8 ай бұрын

    Same 😅😅 looked like a Christmas train set

  • @tommihommi1

    @tommihommi1

    8 ай бұрын

    the series of bunches of particles going through an accelerator is called a train :D

  • @TheRoulette77
    @TheRoulette778 ай бұрын

    I'm so used to people zoning out when i get nerdy,..... its nice to come here and feel like a layman and just barely being able to digest some of these processes...it gives me that feeling of awe and wonder again..... thank you

  • @MegaChickenPunch

    @MegaChickenPunch

    8 ай бұрын

    you are talking to the wrong people

  • @alexhajnal107

    @alexhajnal107

    8 ай бұрын

    @@MegaChickenPunch That reminds me of the party scene from the first _Thrilling Adventures of Lovelace and Babbage_ comic.

  • @randydewees7338
    @randydewees73388 ай бұрын

    The US Navy spent a lot of money on FEL (500M?). Insurmountable engineering problems scaling it up. Of course, that was for directed energy. Perhaps for this specific application it will work. FEL beams in the Navy effort were particularly nasty in terms of power density, simply ate the optics alive.

  • @mgronich948

    @mgronich948

    8 ай бұрын

    Are you sure you're not talking about the US navy's electromagnetic rail gun? Electron beams for directed energy weapons don't work. The electrons will interact with the atmosphere. In space they are bent by the Earth's magnetic field.

  • @MarxMin
    @MarxMin8 ай бұрын

    Your work is much appreciated! Your EUV and foundry tech are my absolute favorite! Keep them coming!

  • @chengong388
    @chengong3888 ай бұрын

    Wiggling electrons with EM field sounds like the ultimate method for generating EM radiation of any desired wavelength.

  • @christophermullins7163

    @christophermullins7163

    8 ай бұрын

    I was thinking that.. many potential applicanrtions

  • @matthewmalaker477

    @matthewmalaker477

    8 ай бұрын

    Synchrotrons use that exact feature to their advantage for a wide variety of applications. In fact, most Synchrotrons are capable of sweeping across ranges of energy for materials studies, and this capability let's you get molecular structures and all sorts of other information about a sample. In fact, Synchrotrons are better at doing this energy sweeping than free electron lasers (at the cost of maximum intensity). For example, x-ray absorption fine structure microscopy (EXAFS or XAFS) and x-ray absorption near-edge structure (XANES) can be used to find the complete molecular structure of a material in a matter of minutes, and you can automate beam-lines that do this. You basically sweep across a spectral line of an atom (one in the x-ray range) and take an absorption spectrum. These spectra have wiggles in them due to atomic bonds and such, so you can do some math (a fancy fourier transform) and find the distribution of atoms around that specific element in a sample. The advanced photon source (APS) at Argonne National Lab does this and a whole host of other things. Most FEL and SLS (Synchrotrons light sources) work in the GeV x-ray regime (1000x more energy than the MeV range discussed here) because that energy range is more useful for research purposes. Also, there is a program at Arizona state University to make a compact FEL by using an intense optical/IR laser as the undulator instead of a magnet bank. I imagine the future of high-energy lithography machines will use plasma Wakefield accelerator cavities and those compact laser undulators (if they can get them working, of course). Synchrotrons and FELs are absolutely incredible machines. Sad that they're so expensive

  • @kayakMike1000

    @kayakMike1000

    8 ай бұрын

    Gee, I don't know... I think you're making it sound way too easy.

  • @GeoffryGifari

    @GeoffryGifari

    8 ай бұрын

    early development of radar and microwave is exactly that

  • @quint3ssent1a

    @quint3ssent1a

    8 ай бұрын

    Sadly, no matter how hard you wiggle them, hard x-rays are still off the charts, although UV is possible.

  • @189643478
    @1896434788 ай бұрын

    I guess the people naming it must have noticed the irony: the "free electron laser" will cost half a billion dollar :D

  • @dpride00

    @dpride00

    8 ай бұрын

    the electrons are free; the equipment on the other hand...

  • @serena-yu

    @serena-yu

    8 ай бұрын

    It was banned in China for years, and scientists jailed, because it had "free" in its name.

  • @alexhajnal107

    @alexhajnal107

    8 ай бұрын

    The electrons are free. If you want a bag to put them in it'll be an extra USD500M.

  • @brodriguez11000

    @brodriguez11000

    8 ай бұрын

    @@dpride00 GNU electrons.

  • @mc.the_machine

    @mc.the_machine

    8 ай бұрын

    Perhaps Red Hat would like to get involved?

  • @benjaminlynch9958
    @benjaminlynch99588 ай бұрын

    Another awesome video. Can’t believe you passed on the opportunity to drop a Dr. Evil meme when introducing the topic of “Lasers”.

  • @robert-wr9xt
    @robert-wr9xt8 ай бұрын

    This channel is brain growing! Thanks

  • @kyoko703
    @kyoko7038 ай бұрын

    Considering the size of the hole that they have dug up over there in Hsinchu... god knows what they can put down there... I saw it first hand back in May and I don't know what they were digging but from my what brother in-law told me, before the hole, there was a literal mountain in its place. It's insane!!!

  • @romanowskis1at
    @romanowskis1at8 ай бұрын

    Most important difference between plasma 13.5 nm light source and 13.5 nm laser (any type, but we can do it only on free electron laser actually) that is the first one is non-coherent. In properties way it is odrinary light source. Laser light is coherent. Most important laser part is resonator. With resonator light is producing in entire volume of gain medium. Photons emmited with act of spontaneus emmision have random vetor, they goes into random direction. Photons emmited durign stimulated emmision have this same (all) properties - also direction of propagation. Light moving parallel to resonator axis are amplified (because it bouncing many times form one mirror to another, and in each pass it is amplified by gain medium) - and all this photons can have this same properties - frequency, phase, direction of propagation, etc. This means this light can be focusing into very small point - smaller than cross section of gain medium and actually it can reach two diameter of light wave lentgh. Parallel beam also mean we can reach high NA.

  • @jerrywatson1958
    @jerrywatson19588 ай бұрын

    Impressive to say the least. I hope they build one in NY. Worth the money if you ask me 4 to 5 fabs running off of one laser is a game changer.

  • @mjrozin
    @mjrozin8 ай бұрын

    Btw the newly released iPhone A17 MLB uses TSMC’s 3N(B) process node.

  • @popquizzz
    @popquizzz8 ай бұрын

    Thanks for the analogies used in this video. I will use and credit your video in a part of training that I do on how coherent optics are used in high-speed networking above 100Gbps Ethernet.

  • @dan-tv1kp
    @dan-tv1kp6 ай бұрын

    I received notification of this video via the Asianometry Newsletter. Momentarily, I thought I had the opportunity to win a *free* electron laser. Disappointment.

  • @d.jensen5153
    @d.jensen51538 ай бұрын

    Contamination of the incredibly sophisticated optics are more than enough reason to move on to free electron lasers. No one wants a dirty neighbor. Improved energy efficiency and a more robust upgrade path are icing on the cake.

  • @tarsierontherun
    @tarsierontherun8 ай бұрын

    I have no idea what 90% of the videos in this channel is about, but I still watch them. It's like starting a movie 30 minutes in.

  • @kepler_22b83

    @kepler_22b83

    8 ай бұрын

    Lol... Ask ChatGPT the stuff you don't get, or find a source that explains the parts that feel like you came late to your university lecture and you know not what they are talking about. If you don't like math, just find a source that doesn't mathematically encrypt its content. Trust me, nowadays if you can't understand something, it is by choice. Though I don't claim certainty, for I don't know your situation... But the human brain has too much computation power for anyone to excuse themselves as too dumb. It could be a software issue, (I mean, someone that can't use their brain to its potential can't expect to harness its full capabilities), but statistically speaking, I think no one is hopeless, for as they say, it is never too late to learn.

  • @nicksonsicnawa9607
    @nicksonsicnawa96078 ай бұрын

    China build accelerator to replace EUV' you don't mension it. Online 2024 or 2025,

  • @asiburger
    @asiburger8 ай бұрын

    "Sir, we need a new machine for our production line." And how much would that be? "Well it's a free ele-" Perfect! Just get it done.

  • @thatoneguy99100
    @thatoneguy991008 ай бұрын

    1.) Nd lasers are not commonly pumped by LEDs, in fact this has only been demonstrated in academic settings. 2.) Stimulated emission does not refer to any emission from an excited state as you explain, but is instead the result of an incoming photon stimulating an electronic transition and subsequent release of an additional photon with identical phase. What you effectively described is spontaneous emission.

  • @nickj2508
    @nickj25088 ай бұрын

    Lyncean and Paul scherrer institute XIL-ii would be notable mentions for other attempts at this technology

  • @mikelay5360
    @mikelay53608 ай бұрын

    Can't wait for 2024 intel to bring the heat on TSMC.

  • @christophermullins7163

    @christophermullins7163

    8 ай бұрын

    💥🔥🔥

  • @AC-jk8wq

    @AC-jk8wq

    8 ай бұрын

    That Intel wait has been awfully long in the past…. and didn’t always meet expectations… Expect 2025 might be when the heat comes…

  • @mikelay5360

    @mikelay5360

    8 ай бұрын

    @@AC-jk8wq I can live with that. The industry desperately needs serious competition. Global foundries and Samsung are lagging way behind

  • @JohnDlugosz
    @JohnDlugosz8 ай бұрын

    Correction: the electron doesn't gain energy that is loses later through emission. The changing electric field emits radiation, as it's changing. Think of it like friction when the undulator tries to pull the electron up or down. But while actual friction creates heat due to random motions of molecules, here the electron reacts less than you would expect from that force on that mass, with some of the force going into creating photons instead.

  • @franciscojavierramirezaren4722

    @franciscojavierramirezaren4722

    8 ай бұрын

    😯 I would thing that is due to charge acceleration that electromagnetic radiation is emitted

  • @vaakdemandante8772

    @vaakdemandante8772

    8 ай бұрын

    @@franciscojavierramirezaren4722 same thing

  • @brotong42

    @brotong42

    8 ай бұрын

    bremstrahlung?

  • @TrabberShir
    @TrabberShir8 ай бұрын

    That "redacted" was amazingly well done.

  • @jscheel66

    @jscheel66

    8 ай бұрын

    What's that mean?

  • @guill90

    @guill90

    8 ай бұрын

    Which fab was it? SMIC or Intel?

  • @TrabberShir

    @TrabberShir

    8 ай бұрын

    @@guill90 My guess would actually be SMIC or Global Foundries, but there are a fair number of other obscure options so I would give it less than a 30% chance that one of my guesses is right.

  • @michaelharrison1093

    @michaelharrison1093

    8 ай бұрын

    My guess would be Intel they have a long history of always choosing the 'Betamax' option when the rest is the industry decides to choose 'VHS'

  • @MrSpiritmonger

    @MrSpiritmonger

    8 ай бұрын

    ​@@guill90probably Intel, dumbest of the dumb

  • @UCmDBecUtbSafffpMEN3iscA
    @UCmDBecUtbSafffpMEN3iscA8 ай бұрын

    I like how there's an organization named KEK, KEK!

  • @vinniepeterss
    @vinniepeterss8 ай бұрын

    damn, the future is exciting!

  • @Luxcium
    @Luxcium8 ай бұрын

    Honestly I am interest in these topics and I love what you are talking about but perhaps the most important thing is that I like how serous and rigorous you are about all those topics the part which is the most important and to which you have always seriously adhered in a rigorous manner is the humours part of the presentation... I can not explain in words how impressive this is as it is like the seriousness brings us to a higher level then the fun part, the release or the acronym *R* (meaning the release) is when we loose the energetic state and get to the enlightened state acronym *G* (meaning ground state)... thanks for every an all videos and all the efforts and dedications...

  • @Anders01
    @Anders018 ай бұрын

    I have been wondering about Samsung struggling with their 3nm manufacturing and even TSMC seems to have problems with 3nm such as low yield, which could be because of early technology but anyway. It seems that EUV lithography is running out of steam, and Ray Kurzweil says that when that happens, historically a new paradigm replaces it and continues the accelerating progress.

  • @punditgi
    @punditgi8 ай бұрын

    Amazing stuff! 🎉😊

  • @nguyenkhoi8745
    @nguyenkhoi87458 ай бұрын

    Thanks!

  • @georgeageorgopoulos
    @georgeageorgopoulos8 ай бұрын

    Hi Asianometry,,,thanks for your analysis of modern Lithography!

  • @robert-wr9xt
    @robert-wr9xt8 ай бұрын

    This channel is amazing. I have learned so much. Keeping it real. Thank you!

  • @DanTheMEOW
    @DanTheMEOW8 ай бұрын

    7:43 Stanfurd University? Are you a fellow California Golden Bear Mr. Asianometry? Great video.

  • @richardnicklin654
    @richardnicklin6547 ай бұрын

    Love this one. Used to work with synchrotrons, and while your physics explanations have minor issues, the business history of this is fascinating. Superb work.

  • @shanent5793
    @shanent57938 ай бұрын

    How are the mirrors and masks going to stand up to coherent illumination? Is it necessarey to diffuse the light to prevent speckle, or does it average out over many pulses?

  • @popquizzz

    @popquizzz

    8 ай бұрын

    Perhaps rotation of the mirrors, but that would be incredibly complex and possibly a nightmare to keep calibrated

  • @cobaltmn5716
    @cobaltmn57163 ай бұрын

    can't wait to hear about X-ray lithography

  • @stormsj
    @stormsj8 ай бұрын

    Next you need to cover China's SSMB EUV source efforts...and that approaches details in general.

  • @gelinrefira

    @gelinrefira

    8 ай бұрын

    Haha no one is going to give China's efforts a fair shake in YT channels like this. But I am glad that a lot of people are calling out for China's FEL efforts and they are probably at the leading edge for this application. Shows that the western propaganda about China is not as tight as they will like it to be.

  • @stormsj

    @stormsj

    8 ай бұрын

    @@gelinrefira Yeah, I don't know if or why you'd try to control information about China's progress if there is interest in handicapping that progress. But silly efforts to delete Chinese business from western helpers is starting to look like it could totally backfire and leave China at the leading edge without even needing to try to take over Taiwan to get there. Not sure it helps or hurts risks for Taiwan in Grand scheme, but seems it mostly hurts if China is made more self sufficient by outside pressures that force it.

  • @gelinrefira

    @gelinrefira

    8 ай бұрын

    @@stormsj That's the thing that westerners are chronically ignorant or deliberately refused to understand on how China looks at the Taiwan issue. I think it's deliberate because they are terminally unable to accept that China is doing great and is innovative, creative, dynamic and powerful. So of course they are going to control information flow. If those Americans who like to denigrate, insult and look down on China will to visit Shenzhen one day, they will either be shell-shocked, or gibbering in terror. "The white man is not on the top anymore!!!" Th thing is China doesn't NEED Taiwan to keep growing and progressing. What Taiwan represent is a wound that have not been healed. It's a political issue, not an economic one. But the Chinese are in no hurry to reunify with Taiwan and they ultimately don't even need TSMC. All China really wants is peaceful reunification and they can wait 10, 20, 50, even a 100 years to do that. But everyone and their dogs in the west talk like China can never have advanced chip technology without Taiwan or the west. Taiwan is a small little province. If you really know China, then Taiwan really is more like a 2nd rate, chronically mismanaged provincial backwater. All US sanctions do is solidify China's conviction and determine, and accelerate their progress because they can centrally planned to focused on project deemed as strategically important. Now you just force China to push their best and brightest to come up with innovative solutions to solve intractable problems. And everyone who bet against China from succeeding on their national project always lose.

  • @vitaliibraslavets

    @vitaliibraslavets

    8 ай бұрын

    @@stormsj At least my opinion, as someone who isn't pro China non particularly pro US. Having tight competion between superpowers in this case US and China reduces the risk of direct military conflict because stakes are to high and risks aren't worth it. But if one side falls behind or significantly threatened in some other way, risk of war increases to dangerous levels because either side might see it as a final option to regain their position.

  • @stormsj

    @stormsj

    8 ай бұрын

    @@vitaliibraslavets this is probably true as far desperation of one side falling, but I think risk of war is already heightened even if efforts to complicate China's competitiveness fail and it becomes more self sufficient as it has disconnected them from a need to cooperate with the west generally in this effort to isolate them. But yeah, even if efforts tend to have intended effects there may be some assessment there is a last chance to take Taiwan or the like as they lose capabilities. It's all been generally ignorant way of going about things ever since Xi took over. I totally get why the rest of the world has reacted to China post Xi as they have... but this reaction has had the effect of strengthening rather than weakening him. They needed to be more savvy and directed annoyance more clearly toward the top of the CCP and been more receptive to corporations and local governments in China willing to stand up to what has been happening under Xi.

  • @petergerdes1094
    @petergerdes10947 ай бұрын

    Any chance of using wakefield style accelerators to reduce the giant size needed and maybe put it into the lithography machines? Or do they not allow the needed preciscion?

  • @imeakdo7

    @imeakdo7

    5 ай бұрын

    Wakefield is still experimental

  • @PplsChampion
    @PplsChampion8 ай бұрын

    SASE is vaguely similar to the "multiple pendulums on a table self-synchronizing" effect

  • @msimon6808

    @msimon6808

    8 ай бұрын

    Exactly. They like humming in unison. It makes them phase coherent.

  • @Andrew-rc3vh

    @Andrew-rc3vh

    8 ай бұрын

    In physics it is called entrainment.

  • @xinadezhong6795
    @xinadezhong67958 ай бұрын

    great video, it for sure that many company like asml tsmc gf samsung are probably research in FEL for decade.

  • @xinadezhong6795

    @xinadezhong6795

    8 ай бұрын

    Even longer

  • @Evolution__X
    @Evolution__X8 ай бұрын

    Next video, bro will upload how to build your own EUV lithography machine 🗿🗿

  • @mysystem32
    @mysystem328 ай бұрын

    Free Electron Laser EUV sounds like a clone of SSMB-EUV being developed by Tsinghua University.

  • @productivemonk5261
    @productivemonk52618 ай бұрын

    You should discuss plasma generators used in semi conductor manufacturing. Research the company Advanced Energy.

  • @jakedill1304
    @jakedill13048 ай бұрын

    Nothing like problematic swagger to set you back a few quarters

  • @busti4552
    @busti45528 ай бұрын

    Could you make a video on wafer steppers? I feel like there is also a lot of RnD and Manufacturing detail hidden there, where else would you need to move something that fast but also so precisely at the same time.

  • @dantesk1836

    @dantesk1836

    8 ай бұрын

    Also wafer aligners. Seems fascinating to me how you can put something so precisely, to a fraction of a nanometer, on top of each other.

  • @alexhajnal107

    @alexhajnal107

    8 ай бұрын

    @@dantesk1836 Part of the magic is clever use masks and etching that lets one use one feature to set the bounds of another feature (thus obviating the need for extreme precision on mask alignment). See for example self-aligned gates and multipatterning. Especially useful for the latter is atomic layer deposition which allows surfaces to be uniformly coated with atomic-level precision on the thickness. You still need to precise align the masks just not quite as accurately or as many times.

  • @walterpark8824
    @walterpark88248 ай бұрын

    Fascinating. OTOH is 'Stanfurd' a bug, a feature, or a comment in this video?

  • @chewycaca
    @chewycaca8 ай бұрын

    Can you make a video on the latest hype ssbm euv?

  • @Beregorn88
    @Beregorn888 ай бұрын

    A for the effort, D- for the correctness of the explanation...

  • @rollingmancave4547
    @rollingmancave45478 ай бұрын

    I like the Red Head In Harmony.

  • @shocksplash6856
    @shocksplash68568 ай бұрын

    Heyo! Just wanted to mention that Apple's M3 SoC chip is produced using TSMC's 3nm process.

  • @mgronich948
    @mgronich9488 ай бұрын

    The FEL idea has been around for a long time. The issue is getting it to work at scale. A lot of difficult engineering. Are there any Chinese institution/universities/companies working on this?

  • @ericwang565

    @ericwang565

    8 ай бұрын

    Tsinghua University is working on an SSMB mini synchotron that could power a few dozen EUV machines at once. They're in the process of constructing a prototype at Xiong'an.

  • @MrSpiritmonger

    @MrSpiritmonger

    8 ай бұрын

    Synchrotron SSMB EUV by Tsinghua in Xiongan

  • @Wizardess
    @Wizardess8 ай бұрын

    7:44 "Stanfurd" eh? I love it. {^_-}

  • @nuetrino
    @nuetrino8 ай бұрын

    thanks for that redaction!

  • @timorder2787
    @timorder27878 ай бұрын

    Great video. What are the disadvantages or key hurdles to this approach though?

  • @alanparker3130
    @alanparker31308 ай бұрын

    Good stuff. With your videos, I really feel close to the bleeding edge of technology.

  • @mikeca2749
    @mikeca27498 ай бұрын

    Lots of KZread videos on China’s SSMB EUV in the last two weeks.

  • @msimon6808

    @msimon6808

    8 ай бұрын

    How are the buildings holding up?

  • @MrSpiritmonger

    @MrSpiritmonger

    8 ай бұрын

    ​@@msimon6808what do you mean?

  • @snowwsquire
    @snowwsquire8 ай бұрын

    N3 BASED FR

  • @hiphopgeeks
    @hiphopgeeks8 ай бұрын

    Cheeky video... sure still quantum tunneling still applies. Im curious if the higher resolution with smoother lithograph would mitigate it and allow much smaller nm gates.

  • @sempervirens23
    @sempervirens238 ай бұрын

    As a vacuum-electron device worker (CPI Microwave) I find this baffling and yet delightful. After years of telling ol' vacuum tube guys that our industry was not only shrinking but shrinking towards zero and would die, now solid state electronics engineers think they may need a linear-beam vacuum-electron device to keep their industry moving forward. This even as GaAs and GaN devices have largely finished moving the power-frequency curve up and to the right, and we still have lots of applications-- replacing your microwave oven's magnetron (a type of vacuum tube) with a GaN device would more or less double its power consumption, for example. I feel now like there will be a need for tubes forever. If you need some LINAC klystrons for a giant $400m FEL we'd be delighted to provide.

  • @msimon6808

    @msimon6808

    8 ай бұрын

    I'm older than transistors. I can relate.

  • @JigilJigil
    @JigilJigil8 ай бұрын

    7:42 "Stanfurd"! = Stanford university

  • @lunamiya1689
    @lunamiya16898 ай бұрын

    less reflection using less mirrors is the ongoing project now

  • @JBernhard72
    @JBernhard728 ай бұрын

    and WHY do we need 3 um chips? When will it stop shrinking?

  • @maxheadrom3088
    @maxheadrom30888 ай бұрын

    It doesn't matter if the stockastic outcome is random or chaotic - applying the binary distributiton it will work 50% of the time. ... because either it works or it doesn't ... 😁

  • @msimon6808

    @msimon6808

    8 ай бұрын

    lol

  • @hououinkyouma1458

    @hououinkyouma1458

    8 ай бұрын

    But then the yield would be 50%?

  • @bluetosoon
    @bluetosoon8 ай бұрын

    Could someone explain why you wouldn't reuse the beam (so not dump it after first use)? Is it not coherent enough after one use or something?

  • @alexhajnal107

    @alexhajnal107

    8 ай бұрын

    Perhaps because one wants to deliver precise pulses (not a continuous beam).

  • @user-sn6ci3rd4m

    @user-sn6ci3rd4m

    8 ай бұрын

    The electron beam has to have very small dimensions the linac accelerator keeps the electron beam dimensions in the transverse direction across the beam. That allows the X-rays that it generates when the electron beam passes through the undulator to build up its electric field. It's that electric field that then starts to work on the electrons that have generated the early x-rays the electrons start to become locked in phase (step) with the X-rays. Then each X-ray becomes coherent with every other X-ray. When the electrons are turned around after giving up energy to the X-rays they naturally start to spread out in position and energy so if you try and use them again they will not give the same characteristics for the next time hence it is best to have "fresh" bunches. The old electrons still have a lot of energy but if you time it correctly the old 15:34 bunches can be used to give up energy to the next set of electrons that are being accelerated. This is the reason it is called an energy recovery free electron laser.

  • @excitedbox5705
    @excitedbox57058 ай бұрын

    you should do a video on NIL and xray lithography. nobody talks about them but they compete with EUV.

  • @CalgarGTX

    @CalgarGTX

    8 ай бұрын

    Pretty sure he did a video comparing the various options and why EUV was chosen

  • @ebx100
    @ebx1008 ай бұрын

    Circulate like a 7-11 Slushee machine? Too Damn technical.

  • @ebx100

    @ebx100

    6 ай бұрын

    I suddenly have the urge to go to 7 11 for a blue Slurpee.

  • @ntabile
    @ntabile8 ай бұрын

    On the other hand, an Ion Implant with an Implanter will be use after Film deposition.This time its Ion being deposited/doped in the trenches and in High Vacuum state and in numerous steps too. Litho->Film->Implant->Etch. Repeat until desired step is completed. Oops, I didn't put the clean or strip steps yet in between those steps as it depends on type of process required or designed.

  • @zralok
    @zralok7 ай бұрын

    What if you were to try making the free electron laser with some sort of plasma accelerator, instead of a linear accelerator. Would make sense in termes of size and energy, but if its suitable and the light pure enough, idk. And its very much still in development, so probably not there when its needed.

  • @yeshwantpande2238
    @yeshwantpande22388 ай бұрын

    Having included particle accelerator in semiconductor chip fabrication has opened gate for new technologies and thought process. One of such could be use of space technology which provides better vaccum and cleanliness apart from twenty four hours of solar energy for uv source (?) and energy. How is the question that needs to be sorted by experts but to explore possibilities I personally can try to invest around 100 million dollars in near future.

  • @dtibor5903
    @dtibor59037 ай бұрын

    Wow, these machines are crazy inefficient...

  • @lephtovermeet
    @lephtovermeet8 ай бұрын

    You probably know the most about chip fab and lithography as well as specific model chip fab equipment than anyone bot specifically employed in the industry.

  • @jameskinard

    @jameskinard

    8 ай бұрын

    There is nothing mind blowingly new here, not to disparage Jon, he is excellent at bringing down the big concepts to us noobs. But if you start to read the papers and interact with people in fabs you learn that a lot of this is just industry happenings. 🤣

  • @stevengill1736
    @stevengill17368 ай бұрын

    Wow, a free electron laser? Getting more sci Fi every year....cheers! Heeey, I caught that REDACTED. ;*[}

  • @JigilJigil
    @JigilJigil8 ай бұрын

    There was this startup called Lyncean Technologies, it was founded by a physicist at the SLAC National Laboratory, and it was working on compact accelerators and a new electron beam accelerator that can produce UV light for future semiconductor industry, Intel was one of its investors, I think last year they went bankrupt, despite their promising technology.

  • @Psychx_
    @Psychx_8 ай бұрын

    Using a particle accelerator to do lithography is metal as f_ck.